Ceramic Semiconductor valve Pad Mechanical strength High temperature resistance Al2O3 Ceramic Parts
As a precision Semiconductor valve manufacturer, we produce and sales multi types ceramic products for Semiconductor as our customer requirements.
We can offer alumina ceramics products with different proportions(95%-99.98% Al2O3).
Alumina ceramics have a excellent properties for chemical and physical stability.
Thermal properties: High heat resistance and high thermal conductivity...
Mechanical properties: High strength and high hardness
We offer a wide range of ceramic products for the Semiconductor Industry including:
Windows
Wafer chucks and arm
Focus rings
Gas distribution plates
Cover rings
Insulators
Liners & process tubes
Nozzles
Domes
Air bearings
Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications.
Our materials offer:
Dimensional stability
Corrosion resistance
Mechanical strength
Electrical insulation
High temperature resistance
| Aumina Ceramic Properties | 96% Alumina Ceramic | 99% Alumina Ceramic |
| Item | Unit | Typical Values |
| Physical Properties |
| Color | | White | Ivory |
| Density | g/cm3 | 3.7 | 3.85 |
| Alumina Content | % | 96% | 99% |
| Gas permeability | | 0 | 0 |
| Water Absorption | | 0 | 0 |
| Mechanical Properties |
| Rockwell Hardness | HRA | 80 | 82 |
| Vickers Hardness (Hv50) | Gpa(Kg/mm²) | 15.7(1600) | 15.7(1600) |
| Flexural Strength(20°C) | Mpa | 300 | 330 |
| Compressive Strength(20°C) | Mpa | 2000 | 2000 |
| Modulus of Elasticity (20°C) | Gpa | 275 | |
| Poisson's Ratio (20°C) | | 0.22-0.23 | |
| Fracture Toughness(20°C) | MPam1/2 | 3.5 | 4 |
| Thermal Properties |
| Thermal Conductivity(20°C-400°C) | W(m.K) | 25 | 27.5 |
| Thermal Expansion Coefficient | 10-6/°C | 6.5-7.5 | 7.6 |
| Thermal Shock Resistance | T°C | 200 | 200 |
| Maximum Use Temperature | °C | 1600 | 1650 |
| Electronic Properties |
| Dielectric Strength | KV/mm | >12 | >10 |
| Dielectric Constant | Er | 9 | 9.1 |
| Dielectric Loss Angle(1MHz) | | 0.0002 | 0.0002-0.0003 |
| Volume Resistivity(20°C) | Ω.cm | >1014 | >1014 |
Company Introuduce
Wuxi Special Ceramic Electrical Co.,Ltd mainly produces alumina, Silicon nitride, Zirconia, Steatite, Boron nitride, Cordierite,mullite products, widely used in metal welding, electronic conductor, mechanics, assembling, insulation, chemicals, instrument, textile, nuclear industry, aerial field.We accept trial produce according to the drawing or sample.It usually takes 15 days to finish trial product.Mass produce usually takes 30 days.Goods' package is carton or PLT.It can be negotiable with each other.
We mainly sell goods to toshiba lighting group in Japan and Europe.Our aim is to deliver goods with high quality at quick delivery date.
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High Temperature Resistance Al2O3 Ceramic Components Semiconductor Ceramics Valve Pad Images
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